Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

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• 作者：Kuan-Chen Chen ; Kuo-Feng Chiu ; Chia-Fu Chen ; Cheng-Yang Lien ; Yu-Jer Tsai ; Ting-Kuei Lien ; Fumihiko Matsunaga ; Masaaki Tanaka ; Kohei Ogiwara ; Kiichiro Uchino and Yoshinobu Kawai
• 刊名：Plasma Processes and Polymers
• 出版年：2016
• 出版时间：June 2016
• 年：2016
• 卷：13
• 期：6
• 页码：584-587
• 全文大小：359K
• ISSN：1612-8869

文摘

A capacitively coupled VHF H₂ plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter-electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn-like distribution near the discharge electrode.