26-1: Invited Paper: Metal Oxide TFT Turnkey Manufacturing Solution for a-Si TFT Lines
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- 作者：Tian Xiao ; Gang Yu ; Chan-Long Shieh ; Jung-Woo Park ; Fatt Foong ; Karman Lee ; Juergen Musolf ; Guangming Wang ; Kristoffer Ottoson ; Kaixia Yang ; Jeff Wang ; Bruce Berkoff and Boo Nilsson
- 刊名：SID Symposium Digest of Technical Papers
- 出版年：2016
- 出版时间：May 2016
- 年：2016
- 卷：47
- 期：1
- 页码：318-321
- 全文大小：681K
- ISSN：2168-0159
文摘
There is strong incentive to upgrade a-Si TFT lines with minimal investments to enable high-end display manufacturing. We developed an oxide TFT manufacturing process which keeps the high-throughout SiNx GI and wet BCE process used in a-Si TFT lines, enabling high resolution LCD and OLED display manufacturing with minimal equipment upgrade and production costs.