Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

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• 作者：Wen Qiao ; Wenbin Huang ; Yanhua Liu ; Xiangmin Li ; Lin-Sen Chen and Jian-Xin Tang
• 刊名：Advanced Materials
• 出版年：2016
• 出版时间：December 21, 2016
• 年：2016
• 卷：28
• 期：47
• 页码：10353-10380
• 全文大小：9097K
• ISSN：1521-4095

文摘

Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light-emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted.