Scanning Probe Nanopatterning and Layer-by-Layer Thinning of Black Phosphorus
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- 作者：Xiaolong Liu ; Kan-Sheng Chen ; Spencer A. Wells ; Itamar Balla ; Jian Zhu ; Joshua D. Wood and Mark C. Hersam
- 刊名：Advanced Materials
- 出版年：2017
- 出版时间：January 4, 2017
- 年：2017
- 卷：29
- 期：1
- 全文大小：3092K
- ISSN：1521-4095
文摘
Nanopatterning and layer-by-layer thinning of black phosphorus is demonstrated with conductive atomic-force-microscope anodic oxidation. The liquid-phase patterning byproduct is readily removed by water rinsing. An alternating-current bias enables direct nanopatterning and thinning on insulating substrates such as SiO2/Si. Field-effect transistors with patterned channels show significant improvements in current modulation by up to a factor of 50.