Role of Molecular Sieves in the CVD Synthesis of Large-Area 2D MoTe₂

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• 作者：Lin Zhou ; Kai Xu ; Ahmad Zubair ; Xu Zhang ; Fangping Ouyang ; Tomá ; s Palacios ; Mildred S. Dresselhaus ; Yongfeng Li and Jing Kong
• 刊名：Advanced Functional Materials
• 出版年：2017
• 出版时间：January 19, 2017
• 年：2017
• 卷：27
• 期：3
• 全文大小：2104K
• ISSN：1616-3028

文摘

The synthesis of high-quality 2D MoTe₂ with a desired phase on SiO₂/Si substrate is crucial to its diverse applications. A side reaction of Te with the substrate Si leading to SiTe and Si₂Te₃ tends to happen during growth, resulting in the failure to obtain MoTe₂. It has been found that molecular sieves can adsorb the silicon telluride byproducts and eliminate the influence of the side reaction during the chemical vapor deposition synthesis of MoTe₂. With the help of molecular sieves, few-layer 1T′ MoTe₂ can be grown from the MoO_x precursor. Pure 1T′ MoTe₂ and 2H MoTe₂ regions in centimeter-sized areas synthesized on the same piece of SiO₂/Si substrate can be obtained by using an overlapped geometry. The strategy provides a new method to controllably synthesize MoTe₂ with desired phases and can be generalizable to the synthesis of other tellurium-based layered materials.