The parameter σmax/δnσmax/δn is proposed to investigate the adhesion property quantitatively. The variations of maximum interface stress show saturation trend as a function of σmax/δnσmax/δn. The 95% of the saturation value is suggested to determine the adhesion criterion. The samples are judged by the CZM-SAW technique and compared with the nanoscratch. The CZM-SAW could be a universal method to characterize the interfacial adhesion.