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Prediction of rounding phenomenon at corner tips in large-area electron beam irradiation
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文摘

Corner tip is rounded after large-area electron beam irradiation.

Electron behavior near workpiece is simulated by electron track analysis.

EB concentrates at corner tip due to concentration of magnetic fields near the tip.

Shape change at tip is analyzed by unsteady heat conduction model.

Rounding phenomenon at tip can be predicted by using our model.

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