IZO deposition by RF and DC sputtering on paper and application on flexible electrochromic devices

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• 作者：L煤cia Gomes ; Ana Marques ; Aida Branco ; Jorge Ara煤jo ; M谩rio Sim玫es ; Susana Cardoso ; Fern ; o Silva ; In锚s Henriques ; C茅sar A.T. Laia ; Cl谩udia Costa
• 关键词：RF sputtering ; DC sputtering ; Paper ; IZO ; Screen-printing ; PEDOT ; PSS
• 刊名：Displays
• 出版年：October, 2013
• 年：2013
• 卷：34
• 期：4
• 页码：326-333
• 全文大小：1364 K

文摘

The present work describes indium-zinc oxide (IZO) sputtering depositions onto several types of papers, using radio-frequency (RF) and direct current (DC) sputtering with a ceramic IZO target. The electrical and optical properties of the resulting materials were optimized; by studying the argon and oxygen gas flow rates and the sputtering power effects. At optimal deposition conditions, thin films of IZO were achieved with a low sheet resistance (about 20 惟/sq) and an optical transmittance of ca. 80% in the visible spectrum range. These materials retained these properties for more than 8 months. Electrochromic devices (ECDs) with several configurations were built with those conductive papers and life cycling and contrast were measured for the ECDs. These devices exhibited a very good color contrast (as defined using m>Lm>^*m>am>^*m>bm>^* color coordinates, = 32) and electrochromic cyclability up to 30,000 redox cycles.