Study of chemical supply system of high-tech process using inherently safer design strategies in Taiwan
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- 作者：Chun-Yu Chena ; chency@mail.vnu.edu.tw" class="auth_mail ; chency1617@gmail.com" class="auth_mail ; Kuo-Chi Changb ; Chi-Hung Huangc ; Chih-Cheng Lub
- 关键词：Inherently safer design (ISD) ; Photolithography ; Failure mode & effective analysis (FMEA) ; Fire dynamics simulation (FDS) ; Chemical supply system
- 刊名：Journal of Loss Prevention in the Process Industries
- 出版年：May 2014
- 年：2014
- 卷：29
- 期：Complete
- 页码：72-84
- 全文大小：3185 K
文摘
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Summarized the statistical data caused the fire and loss of high-tech plant in Taiwan.
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Explored hazards and risk assessment of chemical supply system of high-tech plant.
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Proposed the ISD strategies method, and achieved improvement for actual process.
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Proposed FDS simulation with ISD, and established action plans for the actual process.
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Proposed key recommendations of chemical supply system safety design for high-tech plant.