One step deposition of highly adhesive diamond films on cemented carbide substrates via diamond/β-SiC composite interlayers
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- 作者：Tao Wang ; Hao Zhuang ; Xin Jiang ; xin.jiang@uni-siegen.de" class="auth_mail" title="E-mail the corresponding author
- 关键词：Diamond/β-SiC composite ; Interlayer ; Diamond film ; Adhesion ; Residual stress ; HFCVD
- 刊名：Applied Surface Science
- 出版年：2015
- 出版时间：30 December 2015
- 年：2015
- 卷：359
- 期：Complete
- 页码：790-796
- 全文大小：1891 K
文摘
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Novel diamond/beta-silicon carbide composite gradient interlayers were synthesized.
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The interlayer features a cross-sectional gradient with increasing diamond content.
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Diamond top layers and the interlayers were deposited in one single process.
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The adhesion of the diamond film is drastically improved by employing the interlayer.
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The stress was suppressed by manipulating the distribution of diamond and silicon carbide.