Growth control of RF magnetron sputtered SrRuO₃ thin films through the thickness of LaNiO₃ seed layers

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• 作者：Mingkang Zhu^a ; ^b ; Xianlin Dong^b ; Ying Chen^b ; Fen Xue^b ; Jianyun Lian^b ; Ling Xiao^b ; Guoji Ding^a ; Genshui Wang^b ; ^{genshuiwang@mail.sic.ac.cn" class="auth_mail" title="E-mail the corresponding author}
• 关键词：SrRuO3 ; Thin films ; Orientation control ; Surface morphology ; Magnetic properties ; Electrical transport properties
• 刊名：Ceramics International
• 出版年：2016
• 出版时间：September 2016
• 年：2016
• 卷：42
• 期：12
• 页码：13925-13931
• 全文大小：2622 K

文摘

SrRuO₃ (SRO) thin films were grown on SiO₂/Si substrates with different thickness of LaNiO₃ (LNO) seed layers by RF magnetron sputtering. Effects of LNO thickness on the grain orientation, surface morphology, magnetic behavior and electrical transport properties of SRO films were investigated. The orientation of SRO films transformed from (110)_pc to (001)_pc and the residual stress was released gradually with increasing the thickness (pc refers to the pseudo-cubic unit cell of SrRuO₃). SRO films with higher orientation grown on LNO exhibited more flat surface, higher saturation magnetization, and lower coercive field. The magnetic anisotropy was enhanced on thicker LNO due to the different states of residual stress. In addition, the temperature dependence of resistivity was promoted by the microstructural disorder. (110)_pc-oriented SRO monolayer electrode and (001)_pc-oriented SRO/LNO300 bilayer electrode own low room temperature sheet resistance of 0.38 Ω/□ and 0.26 Ω/□, respectively. The results indicate that the controllable SRO films can be used as not only good bottom electrodes but also promising templates to control the crystallographic orientations of various other perovskite-based functional materials.