Ethanol gas and humidity sensors of CuO/Cu₂O composite nanowires based on a Cu through-silicon via approach

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• 作者：Cheng-Liang Hsu^a ; ^{clhsu@mail.nutn.edu.tw" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Jia-Yu Tsai^aAuthor Vitae ; Ting-Jen Hsueh^b ; ^{0905005@ndl.narl.org.tw" class="auth_mail" title="E-mail the corresponding author}Author Vitae
• 关键词：CuO ; Cu2O ; Nanowires ; Ethanol ; Humidity ; Sensor
• 刊名：Sensors & Actuators: B. Chemical
• 出版年：2016
• 出版时间：1 March 2016
• 年：2016
• 卷：224
• 期：Complete
• 页码：95-102
• 全文大小：3880 K

文摘

High density CuO/Cu₂O composite nanowires were synthesized on simpler Cu through-silicon via by heated oxidation. XRD spectrum analysis and HR-TEM revealed that these nanowires had Cu₂O cubic crystalline and CuO monoclinic structures. The sensing current of the CuO/Cu₂O composite nanowires decreased as the ethanol concentration increased due to their p-type material property. The relative humidity response of the nanowires increased along with the relative humidity. The UV photoresponse of the CuO/Cu₂O composite nanowires also increased with the relative humidity, due to the photocatalytic layer that formed on the nanowire surface.