Mechanical properties and solid particle erosion of MCD films synthesized using different carbon sources by BE-HFCVD
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- 作者：Xinchang Wang ; wangxinchangz@163.com" class="auth_mail" title="E-mail the corresponding author ; Xiaotian Shen ; Fanghong Sun ; Bin Shen
- 关键词：BE-HFCVD ; Micro-crystalline diamond film ; Carbon source ; Mechanical property ; Solid particle erosion
- 刊名：International Journal of Refractory Metals and Hard Materials
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：54
- 期：Complete
- 页码：370-377
- 全文大小：2345 K
文摘
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MCD films are deposited on SiC substrates using different carbon sources.
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Effects of carbon sources on mechanical properties of MCD films are clarified.
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Solid particle erosion tests are conducted on different MCD films.
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Erosion behaviors of different MCD films are compared.