Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube
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- 作者：Yi Xua ; Liuhe Lia ; liliuhe@buaa.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Sida Luoa ; b ; Qiuyuan Luc ; Jiabin Gua ; Ning Leia ; Chunqin Huod
- 关键词：Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D) ; Diamond-like carbon (DLC) ; Inner surface ; Self-enhanced plasma discharge
- 刊名：Applied Surface Science
- 出版年：2017
- 出版时间：30 January 2017
- 年：2017
- 卷：393
- 期：Complete
- 页码：467-473
- 全文大小：1868 K
文摘
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Effect of inner surface materials of tubes on plasma discharge is examined.
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Electron mean free path is used to analyze the films deposition.
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Secondary electrons emitted from inner surface of tube enhance plasma discharge.