Growth processes of nanocrystalline diamond films in microwave cavity and distributed antenna array systems: A comparative study

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• 作者：B. Baudrillart^a ; A.S.C. Nave^b ; S. Hamann^b ; F. Bé ; né ; dic^a ; ^{fabien.benedic@lspm.cnrs.fr} ; G. Lombardi^a ; J.H. van Helden^b ; J. Rö ; pcke^b ; J. Achard^a
• 关键词：Nanocrystalline ; Diamond film ; Plasma CVD ; Microstructure ; Optical emission ; Reactor modelling
• 刊名：Diamond and Related Materials
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：71
• 期：Complete
• 页码：53-62
• 全文大小：1582 K
• 卷排序：71

文摘

A comparison between high temperature and low temperature nanocrystalline diamond film growth processes is carried out Both film characteristics and plasma features are investigated Similarities and disparities of film properties and plasma behavior are pointed out and discussed