Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
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- 作者：Sekhar C. Raya ; Raysc@unisa.ac.za" class="auth_mail" title="E-mail the corresponding author ; W.F. Pongb ; P. Papakonstantinouc
- 关键词：Diamond like carbon (DLC) ; Fe-doped DLC ; N-doped DLC ; Si-doped DLC
- 刊名：Thin Solid Films
- 出版年：2016
- 出版时间：1 July 2016
- 年：2016
- 卷：610
- 期：Complete
- 页码：42-47
- 全文大小：1298 K
文摘
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Fe, N and Si doped DLC films deposited by dip, PLD and PECVD methods respectively
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DLC:Fe thin films have higher hardness/Young's modulus than DLC:N(:Si) thin films.
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sp3 and sp2 contents are estimated from C K-edge XANES and VB-PES measurements.