Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching
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- 作者：Guobin Jia
- 关键词：Ordered silicon nanowire array ; Langmui&ndash ; Blodgett ; Porous silicon ; Nanosphere lithography ; Ag-assisted wet chemical etching
- 刊名：Photonics and Nanostructures - Fundamentals and Applications
- 出版年：2016
- 出版时间：April 2016
- 年：2016
- 卷：19
- 期：Complete
- 页码：64-70
- 全文大小：2656 K
文摘
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- <p id="par0005">An improved Langmuir–Blodgett (LB) process independent to surface states is presented.p>
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- <p id="par0010">Issues in the nanosphere lithography combined with Ag-assisted wet chemical etching discussed.p>
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- <p id="par0015">Experimental evidence of the origin of formation of porous structures.p>
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- <p id="par0020">Ordered silicon nanowire array free of porous structure was prepared.p>
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- <p id="par0025">Ordered silicon nanowire array with aspect ratio >100 was prepared.p>