A 50 kHz Micromachined Electrostatic Driven Vibratory Grating Laser Scanner

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• 作者：Yu Du^a ; ^b ; Guangya Zhou^a ; ^{mpezgy@nus.edu.sg"" rel=""nofollow} ; Fook Siong Chau^a ; Koon Lin Cheo^a ; Qingxin Zhang^b ; Hanhua Feng^b
• 关键词：Diffraction graitng ; laser scanners ; micro resonator ; micro-opto-electromechanical-systems (MOEMS)
• 刊名：Physics Procedia
• 出版年：2011
• 出版时间：2011
• 年：2011
• 卷：19
• 期：Complete
• 页码：308-314
• 全文大小：1355 K

文摘

A 50 kHz micromachined electrostatic driven vibratory grating laser scanner has been successfully developed for high-speed laser scanning applications. Unlike the conventional grating platform having uniform thickness across the entire diffraction surface, the grating platform in this study is thinned and reinforced by a circular frame, which is used to reduce its rotational inertia and keep its rigidity. The scanner is fabricated using a simple silicon-oninsulator (SOI) technology based micromachining process with only 4 photo masks used. This paper presents the design, simulation, fabrication process and experimental measurement results of the high-speed vibratory grating scanner. The prototype scanner with a 1 mm diameter diffraction grating is capable of scanning at 50.192 kHz with and optical scan angle of 14.1° when illuminated with a 635 nm wavelength incident laser beam.