Thin film deposition of diamond using normal paraffins as source of diamond nucleation centers

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• 作者：A. Ershova ; A. Eizenbraun
• 关键词：A. Nanostructures ; A. Polymers ; B. Vapor deposition ; C. Electron energy loss spectroscopy (EELS) ; C. Electron microscopy
• 刊名：Materials Research Bulletin
• 出版年：2012
• 出版时间：November, 2012
• 年：2012
• 卷：47
• 期：11
• 页码：3681-3690
• 全文大小：966 K

文摘

We propose a process for diamond thin film (DTF) deposition using normal paraffins (nP) as source of diamond nucleation centers. We deposited micro-crystalline diamond thin films (MCDTF) on a Cu substrate using Hot Filament CVD (HFCVD) and Passive Pt/Pd Surface Catalysis (PPt/PdSC) methods. Beeswax and a 1:1 mixture of normal paraffins of the general formula CH₃(CH₂)_nCH₃ with n = 22 and 26 were tested as nP starting material. The films obtained were characterized by scanning electronic microscopy (SEM), Raman scattering temperature dependent spectroscopy and X-ray diffraction (XRD) methods, all of which confirmed that the deposited material is MCDTF.