Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask
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- 作者：D. Virganavičiusa ; b ; V.J. Cadarsoa ; R. Kirchnera ; L. Stankevičiusb ; T. Tamulevičiusb ; S. Tamulevičiusb ; H. Schifta ; helmut.schift@psi.ch" class="auth_mail" title="E-mail the corresponding author
- 关键词：Diamond like carbon ; Nanocomposites ; Thermal nanoimprint lithography ; Plasma etching ; Refractive index sensing
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 November 2016
- 年：2016
- 卷：385
- 期：Complete
- 页码：145-152
- 全文大小：3043 K
文摘
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Nanopatterning of thin diamond-like carbon (DLC) films and silver containing DLC composites.
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Nanoimprint lithography with thermoplastic silicon containing resist.
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Zero-residual layer imprinting and pattern transfer by reactive ion etching.
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Robust leaky waveguide sensors with sensitivity up to 319 nm/RIU.
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