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Nanomechanical and nanotribological behavior of ultra-thin silicon-doped diamond-like carbon films
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文摘

Nanomechanical and nanotribological behavior of Si-DLC films is studied.

Introduction of Si in DLC films leads to large improvements in wear resistance.

Wear track decreases initially and then increases as the Si content increases.

Friction force and wear depth decrease with an increase of the density of DLC films.

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