A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
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- 作者：Tingzhong Xua ; tingzhongxu@163.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Libo Zhaoa ; libozhao@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Zhuangde Jianga ; zdjiang@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Xin Guoa ; aguoxinz@126.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Jianjun Dinga ; dingjianjun@126.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Wei Xiangb ; xiangweixjtu@gmail.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Yulong Zhaoa ; zhaoyulong@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：MEMS ; Ultra-low pressure sensor ; Peninsula-island structure ; Sensitivity ; Non-linearity
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：15 June 2016
- 年：2016
- 卷：244
- 期：Complete
- 页码：66-76
- 全文大小：4950 K
文摘
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A bossed diaphragm combined with peninsula-island structure was presented for ultra-high sensitive pressure sensor.
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Compared with other pressure sensor with different diaphragm structure, the proposed diaphragm featured bossed diaphragm combined with peninsula-island structure has the highest sensitivity and first resonance frequency with relatively low non-linearity error.
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A designing method and the optimization process of the bossed diaphragm combined with peninsula-island structure was presented to give a designing guidance for the proposed diaphragm.
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A pressure sensor has been fabricated and experiment has been carried out to verify the proposed diaphragm.