Challenges in quantitative crystallographic characterization of 3D thin films by ACOM-TEM

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• 作者：A. Kobler^a ; ^b ; C. Kü ; bel^a ; ^b ; ^{christian.kuebel@kit.edu}
• 关键词：ACOM-TEM ; Automated crystal orientation mapping for transmission electron microscopy ; BF/DF-TEM ; Bright field and dark field transmission electron microscopy ; EBSD ; Electron back scatter diffraction ; HRTEM ; High resolution transmission electron microscopy ; µ ; pSTEM ; Micro-probe STEM ; nc ; Nanocrystalline ; PED ; Precession electron diffraction
• 刊名：Ultramicroscopy
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：173
• 期：Complete
• 页码：84-94
• 全文大小：13938 K
• 卷排序：173

文摘

Tilt series of nanocrystalline Pd thin films. Quantitative ACOM-TEM data processing, including a rotation map of crystallites. Noise filter for orientation data: Ambiguity Filter and min. distance filter.