Nucleation and core-shell formation mechanism of self-induced InxAl1−xN core-shell nanorods grown on sapphire substrates by magnetron sputter epitaxy
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- 作者：Ching-Lien Hsiao ; hcl@ifm.liu.se" class="auth_mail" title="E-mail the corresponding author ; Justinas Palisaitis ; Per O.Å ; . Persson ; Muhammad Junaid ; Elena Alexandra Serban ; Per Sandströ ; m ; Lars Hultman ; Jens Birch
- 关键词：InAlN ; Nanorods ; Nanostructures ; STEM ; EDX ; Sputtering ; MSE
- 刊名：Vacuum
- 出版年：2016
- 出版时间：September 2016
- 年：2016
- 卷：131
- 期：Complete
- 页码：39-43
- 全文大小：1457 K
文摘
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A comprehensive study on the structural evolution of InxAl1−xN nanorods and thin films grown by magnetron sputter epitaxy.
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The formation mechanism of self-induced core-shell InxAl1−xN nanorod structure is reported.
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The morphological and compositional evolutions of ternary alloys upon temperature and seed layer are reported.
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Two different growth modes, Stranski-Krastanov and Volmer-Weber, are proposed.