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Fabrication and characterization of micro dissolved oxygen sensor activated on demand using electrolysis
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文摘
The proposed DO sensor can be activated on demand by the explosion of thin SiO2 film using electrolysis. The structure of the proposed DO sensor is composed of three electrodes, solid electrolyte, PDMS cavity and sensor cap which is the thin SiO2 film with the patterned electrodes for the electrolysis. Anode plays a key role at electrolysis reaction of the sensor cap. The characteristic of the proposed DO sensor was verified by measurements using cyclic voltametry and chronoamperometry.

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