A numerical model for multiple detector energy dispersive X-ray spectroscopy in the transmission electron microscope
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- 作者：W. Xu ; J.H. Dycus ; X. Sang ; J.M. LeBeau ; jmlebeau@ncsu.edu" class="auth_mail" title="E-mail the corresponding author
- 关键词：Energy dispersive X-ray spectroscopy (EDS) ; Super-X ; Detector collection angle ; X-ray absorption correction ; Shadowing ; Spurious X-rays
- 刊名：Ultramicroscopy
- 出版年：2016
- 出版时间：May 2016
- 年：2016
- 卷：164
- 期：Complete
- 页码：51-61
- 全文大小：6984 K
文摘
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A novel numeric model is developed to predict the effective detector collection angle for multi-detector EDS in the transmission electron microscope.
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The precise geometry of specimen holder is incorporated to determine the influence of holder shadowing
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The role of X-ray filtering by the Be specimen carrier is investigated.
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Predicted counts and intensity ratios are directly compared to experiment as a function of tilt and are shown to be in excellent agreement
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The detector intensity sum effectively reduces errors compared to the individual detector signals.