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Hydrogen passivation effect on the conversion efficiency of Si solar cells by low-energy proton implantation
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文摘

We fabricated Si solar cell by hydrogen implantation with low energy.

We examine changes in the energy level and the ion concentration.

Decreasing energy will increase cell quality if the concentration is same.

Decreasing concentration will increase cell quality if the energy is same.

Implantation effects depend on the surface passivation about cell efficiency improvement.

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