Surface treatment of indium tin oxide by oxygen-plasma for organic light-emitting diodes

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• 作者：Lu ; Dan ; Wu ; Ying ; Guo ; Jianhua ; Lu ; Guang ; Wang ; Yue ; Shen ; Jiacong
• 关键词：Oxygen-plasma treatment ; Indium tin oxide electrodes ; Light-emitting devices
• 刊名：Materials Science and Engineering: B
• 出版年：2003
• 出版时间：January 25, 2003
• 年：2003
• 卷：97
• 期：2
• 页码：141-144
• 全文大小：98.4 K

文摘

We have carried out a systematic study to optimize the processing conditions in oxygen-plasma treatments on indium tin oxide (ITO) substrates used in organic light-emitting diodes (OLEDs). The treated ITO substrates were investigated by both contact angle measurements and X-ray photoelectron spectroscopy (XPS). It was found that oxygen-plasma treatment was quite effective in removing organic contaminants on the ITO surface, causing a reduction in contact angle. XPS revealed that the treatment led to a decrease in the surface content of carbon and an increase in the surface content of oxygen. Consequently, enhanced hole-injection, increased luminance efficiency and improved operational stability were observed in OLEDs having an ITO anode treated at the optimized conditions.