Sol-gel-derived ZnO/Cu/ZnO multilayer thin films and their optical and electrical properties
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- 作者：Mingsong Wang ; wangms@mail.ujs.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Jianyu Ji ; Shuaijun Luo ; Lingxia Jiang ; Jiangtao Ma ; Xu Xie ; Yang Ping ; Juanjuan Ge
- 关键词：Transparent conducting film ; ZnO ; Cu ; Sol-Gel ; Optical properties ; sheet resistance
- 刊名：Materials Science in Semiconductor Processing
- 出版年：2016
- 出版时间：15 August 2016
- 年：2016
- 卷：51
- 期：Complete
- 页码：55-59
- 全文大小：1529 K
文摘
Sol-gel preparation of transparent conducting ZnO/Cu/ZnO multilayer thin films has been investigated. CuO thin films were deposited on glass substrates via a dip-coating method. The CuO thin films were further subjected to reductive annealing in hydrogen to form highly conductive Cu thin films with sheet resistances as low as 10 Ω/□. ZnO/Cu/ZnO multilayers were successfully prepared in a similar way by reducing ZnO/CuO/ZnO. The sheet resistance of the ZnO/Cu/ZnO multilayer thin films is about 10 kΩ/□, which is much higher than that of the pure Cu thin films. The formation of large discrete Cu crystallites in the multilayers explains the poor electrical conductivity of the sol-gel-derived ZnO/Cu/ZnO multilayers.