Rapid response and recovery humidity sensor based on CoTiO₃ thin film prepared by RF magnetron co-sputtering with post annealing process

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• 作者：Jing Lu^a ; ; Yabin Zhang^a ; Zhuan Li^b ; Jianfeng Huang^a ; Yong Wang^a ; Jianpeng Wu^a ; Haiyan He^a
• 关键词：CoTiO3 ; Thin film ; Co-sputtering ; Humidity sensitivity ; Rapid response/recovery
• 刊名：Ceramics International
• 出版年：2015
• 出版时间：December 2015
• 年：2015
• 卷：41
• 期：10
• 页码：15176-15184
• 全文大小：2495 K

文摘

The fast-response humidity sensor based on CoTiO₃ thin film was prepared by RF magnetron co-sputtering using TiO₂ and Co₂O₃ targets followed by post-annealing process. The effects of annealing temperature and target sputtering power ratio on the preparation and humidity sensing properties of CoTiO₃ films were thoroughly investigated. The results show that an annealing treatment is beneficial for the crystallization and (100) preferred orientation of CoTiO₃ film. The sputtering power ratio of Co₂O₃ to TiO₂ affects the phase composition and morphology of the films. The most sensitive CoTiO₃ film with fastest response/recovery is prepared by employing co-sputtering power of 100 W and 400 W for Co₂O₃ and TiO₂, respectively, as well as the post-annealing at 650 °C for two hours. The sensitivity value of the as-prepared CoTiO₃ film is 17.02 towards 95% RH, and the response/recovery time is as short as 1 s. This fast response is attributed to (100) preferred orientation and the fine-established-net morphology.