Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors
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- 作者：Kestutis Grigoras ; Jari Keskinen ; Leif Grö ; nberg ; Elina Yli-Rantala ; Sampo Laakso ; Hannu Vä ; limä ; ki ; Pertti Kauranen ; Jouni Ahopelto ; Mika Prunnila ; mika.prunnila@vtt.fi" class="auth_mail" title="E-mail the corresponding author
- 关键词：Supercapacitor ; Integrated energy storage ; On-chip integration ; Porous silicon ; ALD ; TiN
- 刊名：Nano Energy
- 出版年：2016
- 出版时间：August 2016
- 年：2016
- 卷：26
- 期：Complete
- 页码：340-345
- 全文大小：3195 K
文摘
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First in-chip supercapacitor proposed and fabricated.
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High capacitance, energy and power density porous Si–TiN supercapacitor electrodes realized.
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Conformal coating of ultra-high aspect ratio pores by TiN.