d="p0005">Variations of the plasma parameters in repeated LIBS sampling or in depth profiling reduce the precision.
dd><dt class="label">•dt><dd>d="p0010">Through easily measurable spectral values these variations might be inferred and corrected.
dd><dt class="label">•dt><dd>d="p0015">Here proposed data correction procedure was theoretically supported.
dd><dt class="label">•dt><dd>d="p0020">The LIBS precision was improved up to five times.
dd><dt class="label">•dt><dd>d="p0025">The corrected intensities are independent on the crater development.
dd><dt class="label">•dt><dd>d="p0030">The LIBS results are consistent with those obtained by other analytical techniques.
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