Love-mode surface acoustic wave devices based on multilayers of TeO₂/ZnO/Si(1 0 0) with high sensitivity and temperature stability

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• 作者：Jing-Ting Luo^a ; ^b ; Ao-Jie Quan^a ; Guang-Xing Liang^a ; Zhuang-Hao Zheng^a ; Sami Ramadan^c ; Chen Fu^c ; ^{chen.fu@newcastle.ac.uk} ; Hong-Lang Li^d ; ^{lhl@mail.ioa.ac.cn} ; Yong-Qing Fu^b
• 关键词：Surface acoustic wave ; Love wave ; Multilayered structure ; ZnO film
• 刊名：Ultrasonics
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：75
• 期：Complete
• 页码：63-70
• 全文大小：2185 K
• 卷排序：75

文摘

Love wave mode of TeO2/ZnO(112¯0)/Si structure is proposed for biosensing applications. TeO2 film compensates the temperature effect and enhances the sensitivity of the Love mode device. K2, temperature coefficient and sensitivity are analyzed. Optimal design parameters are defined to achieve high sensitivity and temperature-stable.