Influence of the bilayer thickness on the optical properties of Al₂O₃-Y₂O₃ dielectric nanolaminate films grown by thermal atomic layer deposition

详细信息    查看全文

• 作者：J. Ló ; pez^a ; ^b ; ^{javierlo21@cnyn.unam.mx} ; A. Sotelo^c ; F.F. Castilló ; n^a ; R. Machorro^a ; N. Nedev^d ; M.H. Farí ; as^a ; H. Tiznado^a
• 关键词：Thin films ; Multilayers ; Nanostructures ; Optical materials ; Optical properties
• 刊名：Materials Research Bulletin
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：87
• 期：Complete
• 页码：14-19
• 全文大小：1261 K
• 卷排序：87

文摘

Ultrathin nanolaminates based on Al2O3-Y2O3 bilayers were successfully grown by ALD. The optical properties of Al2O3-Y2O3 nanolaminates depend on the bilayer thickness. The refractive index and the optical bandgap of the nanolaminates can be modulated. The optical properties indicate that this material can be exploited for optical coatings. Combination of these materials is suitable for developing devices at nanoscale.