The results of the kinetic study of ozone decomposition over carbon fibrous materials and metal complex compounds (CuCl2) supported on them at ozone concentrations in the 3.1 × 10–8–3.1 × 10–5 mol/l range are presented. Ozone decomposition occurs mainly in a catalytic way with the steady-state regime attainment depending on CFM physico-chemical as well as structural characteristics and macrokinetic factors of the process. Copper (II) catalyzes decomposition of ozone microconcentrations only. The data obtained can be a base for the development of sanitary air cleaning units and respirators (protective gas-masks).