Scalable shape-controlled fabrication of curved microstructures using a femtosecond laser wet-etching process
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- 作者：Hao Bian ; Qing Yang ; Feng Chen ; chenfeng@mail.xjtu.edu.cn ; Hewei Liu ; Guangqing Du ; Zefang Deng ; Jinhai Si ; Feng Yun ; Xun Hou
- 关键词：Femtosecond laser ; Wet-etching process ; Microstructures ; Microwells
- 刊名：Materials Science and Engineering: C
- 出版年：2013
- 出版时间：1 July, 2013
- 年：2013
- 卷：33
- 期：5
- 页码：2795-2799
- 全文大小：1023 K
文摘
Materials with curvilinear surface microstructures are highly desirable for micro-optical and biomedical devices. However, realization of such devices efficiently remains technically challenging. This paper demonstrates a facile and flexible method to fabricate curvilinear microstructures with controllable shapes and dimensions. The method composes of femtosecond laser exposures and chemical etching process with the hydrofluoric acid solutions. By fixed-point and step-in laser irradiations followed by the chemical treatments, concave microstructures with different profiles such as spherical, conical, bell-like and parabola were fabricated on silica glasses. The convex structures were replicated on polymers by the casting replication process. In this work, we used this technique to fabricate high-quality microlens arrays and high-aspect-ratio microwells which can be used in 3D cell culture. This approach offers several advantages such as high-efficient, scalable shape-controllable and easy manipulations.