A two-step identification method based on the so-called sandwich model with hysteresis for micropositioning stages with piezoelectric actuators is proposed.

At the first step, a degeneration input within a specified operation region is implemented to decompose the linear parts from the system. Then, the linear dynamic submodels are derived by using a recursive identification approach.

Then, at the second step, an input covering all the operation points within the whole operation region is applied to the excitation of the stage. Both input and output of the piezoelectric actuator are estimated based on the input linear submodel and inverse output linear submodel obtained at the first step of identification.

Subsequently, the experimental results on modeling of a micropositioning stage with piezoelectric actuator are presented.