Synthesis and characterisation of Mo-B-C thin films deposited by non-reactive DC magnetron sputtering

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• 作者：P. Malinovskis^a ; ^{paulius.malinovskis@kemi.uu.se} ; J. Palisaitis^b ; P.O.Å ; . Persson^b ; U. Jansson^a ; E. Lewin^a
• 关键词：Mo-B-C ; Magnetron sputtering ; Films ; Hard coatings ; Molybdenum diboride ; Nanocomposite
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：309
• 期：Complete
• 页码：506-515
• 全文大小：2255 K
• 卷排序：309

文摘

Ternary Mo-B-C thin films deposited at low temperature have been investigated. Low carbon content films are nanocomposites of MoB2 − x and a-BCx tissue phase. High carbon content films are amorphous nanocomposites of Mo-rich and Mo-poor phases. H decreases (29–22 GPa) with C content, while resistivity increases (175–395 μΩ cm). Films show high coefficient of friction (0.8–1.1) in non-lubricated sliding