Backside patterned texturing (BPT) is introduced for the fabrication of submicron to micro scale surface features using ultraprecision diamond machining.

Unlike from conventional methods, BPT produces the controlled surface features without any external gadgets or synchronized tool-spindle motion.

BPT methodology is presented and various types of freeform surface textures like arrays of bumps with mirror surface quality are formed.

Surface textures having the height (t_b) from hundreds of nanometer to few micrometers are successfully fabricated.

The texture profile height (t_b) is a function of workpiece thickness, machining parameters and backside pre-fabricated pattern.