Thermal stability of the sensing properties in H₂ sensors composed of Pd nanogaps on an Elastomeric Substrate

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• 作者：Byungjin Jang^a ; ¹Author Vitae ; Wonkung Kim^a ; ¹Author Vitae ; Min-Jung Song^b ; ^{mjsong@kyonggi.ac.kr}Author Vitae ; Wooyoung Lee^a ; ^{wooyoung@yonsei.ac.kr}Author Vitae
• 关键词：Palladium (Pd) ; Nanogap ; Hydrogen sensors ; Poly(dimethylsiloxane) (PDMS) ; Thermal stability
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：240
• 期：Complete
• 页码：186-192
• 全文大小：2613 K
• 卷排序：240

文摘

A H2 sensor that composed of Pd thin films on an elastomeric substrate was tested after annealed at 80–200 °C, respectively. The wrinkling wavelength and compressive stress of the Pd/PDMS were estimated using simple equations. Higher annealing temperatures led to a decrease in the wrinkling wavelength and an increase in the width of the Pd nanogap. The enlarged Pd nanogap contributed to a decrease in the performance of the sensor.