Optically-rough and physically-flat TCO substrates for superstrate-type thin-film solar cells: sol-gel Zn1−xMgxO coating on nanoimprint patterned glass substrates
New optically-rough and physically-flat TCO substrates were developed in simple way. It showed low surface roughness and strong diffraction behavior. It enabled a-Si solar cells with large open-circuit voltage and good spectral response.