Morphology and microstructure of textured SnO₂ thin films obtained by spray pyrolysis and their effect on electrical and optical properties

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• 作者：F. Paraguay-Delgado ; M. Miki-Yoshida ; W. Antunez ; J. Gonzá ; lez-Herná ; ndez ; Y.V. Vorobiev ; E. Prokhorov
• 关键词：Textured films ; Tin dioxide ; Spray pyrolysis ; Transmission electron microscopy ; Atomic for microscopy ; Electrical properties and measurements ; Structural properties
• 刊名：Thin Solid Films
• 出版年：2008
• 出版时间：30 January 2008
• 年：2008
• 卷：516
• 期：6
• 页码：1104-1111
• 全文大小：1912 K

文摘

Tin dioxide thin films on glass substrate with different Zn doping levels were obtained by spray pyrolysis. Their microstructure, preferred crystallographic orientation, electrical and optical properties were extensively studied. The characterization techniques employed were scanning electron microscopy, transmission electron microscopy, atomic force microscopy, X-ray diffraction, electrical conductivity and optical transmission measurements. It was found that the material obtained has a nano-scale texture which characteristic size and orientation strongly depend on the Zn doping level. Doping-induced variations in texture and structure modify both the electrical and optical properties of films (namely, refractive index and transparency). The results obtained are relevant for potential applications of the studied films in gas sensing and photoconductive devices.