Enhanced recovery of PGME and PGMEA from waste photoresistor thinners by heterogeneous azeotropic dividing-wall column
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- 作者：Yus Donald Chaniagoa ; Gregorius Rionugroho Harviantoa ; Alireza Bahadorib ; Moonyong Leea ; mynlee@yu.ac.kr" class="auth_mail" title="E-mail the corresponding author
- 关键词：Waste photoresistor thinner recovery ; PGME ; PGMEA ; Heterogeneous azeotrope ; Dividing-wall column ; Process integration
- 刊名：Process Safety and Environmental Protection
- 出版年：2016
- 出版时间：September 2016
- 年：2016
- 卷：103
- 期：part_PB
- 页码：413-423
- 全文大小：2410 K
文摘
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Recovery of PGME and PGMEA from waste thinner in display/semiconductor industries.
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Optimal conventional distillation sequence removes the azeotrope difficulty in recovery.
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Thermally integrated HA-DWC improves the process energy efficiency significantly.
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The proposed HA-DWC provides an attractive option for thinner recycling industries.