Dense and high-stability Ti₂AlN MAX phase coatings prepared by the combined cathodic arc/sputter technique

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• 作者：Zhenyu Wang^a ; ^b ; Jingzhou Liu^a ; Li Wang^a ; Xiaowei Li^a ; Peiling Ke^a ; ^{kepl@nimte.ac.cn} ; Aiying Wang^a ; ^{aywang@nimte.ac.cn}
• 关键词：Nano-laminate ; MAX phases ; Combined cathodic arc/sputter ; Dense ; High-stability
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：28 February 2017
• 年：2017
• 卷：396
• 期：Complete
• 页码：1435-1442
• 全文大小：4194 K
• 卷排序：396

文摘

The Ti-Al-N coating deposited by the combined cathodic arc/sputter technique behaved a multilayer structure. The Ti2AlN MAX phase coating was successfully prepared after annealing treatment. The obtained Ti2AlN coating exhibited a compact and crack-free microstructure. The numbers of macro-particles were greatly reduced. The obtained Ti2AlN coating exhibited a high-stability.