Characterization and modeling of a piezoresistive three-axial force micro sensor

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• 作者：N. Alcheikh ; C. Coutier ; S. Giroud ; C. Poulain ; P. Rey
• 关键词：Three-axial force micro sensor ; High sensitivity ; Electro-mechanical characterization ; Finite element method simulations
• 刊名：Sensors and Actuators A: Physical
• 出版年：2013
• 出版时间：15 October, 2013
• 年：2013
• 卷：201
• 期：Complete
• 页码：188-192
• 全文大小：1424 K

文摘

To mimic human mechanoreceptors and give sense of touch to robots highly integrated and highly sensitive three-axial force micro sensors are required. In this paper, we present the fabrication and electro-mechanical characterization of silicon based 3D force micro sensors with piezoresistive gauges with a footprint less than 1.5 mm². The measurements have been validated with a Finite Element Modeling (FEM). The sensor sensitivities to normal and tangential loads are about 1.03 mV/V/mN and 1.6 mV/V/mN, respectively. For such high integrated 3D force sensors these values are among the highest sensitivities reported in the literature. High linearity and low hysteresis under normal forces have also been demonstrated.