A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption

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• 作者：Massimo Piotto^a ; Simone Del Cesta^b ; Paolo Bruschi^b ; ^{p.bruschi@iet.unipi.it}
• 关键词：Vacuum gauge ; CMOS sensors ; Micromachining ; Thermal sensor ; MEMS
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：766-769
• 全文大小：265 K
• 卷排序：168

文摘

A micro-Pirani vacuum sensor with an operating pressure range of more than 5 decades is described. The device is fabricated by applying a low-resolution and potentially low-cost front-side bulk micromachining step to a chip produced with a commercial CMOS technology. Maximization of the thermally coupled surfaces has been obtained by stacking all layers available by default in the CMOS process. This design choice and the integration of a low-noise, low-power readout interface allowed achievement of state-of-art performances with a fabrication approach affordable even to SMEs and small University laboratories.