Functional testing and characterisation of (bio-)chemical sensors on wafer level

详细信息    查看全文

• 作者：Arshak Poghossian ; Holger Wagner ; Michael J. Schö ; ning
• 关键词：field effect ; (bio-)chemical sensor ; pH ISFET ; wafer-level testing ; microcell
• 刊名：Procedia Chemistry
• 出版年：2009
• 出版时间：August 2009
• 年：2009
• 卷：1
• 期：1
• 页码：835-838
• 全文大小：298 K

文摘

An automated computer-assisted system for the testing and characterisation of (bio-)chemical sensors on wafer level is developed and integrated into a commercial prober station. The system enables the identification and selection of “good” sensors on wafer level and thus, allows avoiding expensive bonding, encapsulation and packaging processes for defective or non-functioning sensor structures. Moreover, a specifically designed flow-through electrochemical microcell offers the possibility of wafer-level characterisation of (bio-)chemical sensors in terms of sensitivity, hysteresis and response time at an early process stage. The system has been exemplarily tested using wafers combining pH-sensitive field-effect transistors with different geometrical sizes and gate layouts.