A facile hydrothermal method has been developed to grow large-scale ZnO nanorods arrays (NRs) on boron-doped diamond (BDD) films at a low temperature of 95 ¡ãC. The ZnO nanorods with average diameter of 200 nm are single-crystal hexagonal structure and grow along the [0 0 1] direction. The thin ZnO film plays a key role in driving the nucleation and growth of the ZnO NRs on BDD films. It has been demonstrated that the ZnO nanorods are grown vertically on diamond facets, and this growth behavior is independent of types of diamond facets. The growth mechanism and room temperature photoluminescence (PL) properties of ZnO NRs are investigated.