Alkanethiolate monolayers were formed on GaAs(100) using a 20 min liquid immersion. The longest chain containing 20 CH2 groups protected the surface for 30 min from reoxidation. A reaction-diffusion model shows that oxygen diffusion through the carbon chains is fast. Alkanethiolates protect the surface by reducing the reaction rate of oxygen with the surface. Assembly of the alkane chains directs sulfur atoms to bond to the surface.