Structure, ferroelectric and dielectric characterization of Mn-doped 0.938(Bi_0.5Na_0.5)TiO₃-0.062BaTiO₃ thin film

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• 作者：Zhijian Wang ; Junyuan Wang ; ^{yihuina01161013@163.com" class="auth_mail" title="E-mail the corresponding author} ; Wenhua Du ; Jiping Zhang ; Zhiqiang Zeng ; Rijun Wang ; Zhifang Zhao
• 关键词：Lead-free ; Thin film ; Ferroelectric ; MEMS
• 刊名：Ceramics International
• 出版年：2016
• 出版时间：15 November 2016
• 年：2016
• 卷：42
• 期：15
• 页码：17839-17842
• 全文大小：929 K

文摘

Lead-free ferroelectric thin films with excellent performances are desired for environmentally friendly micro-electromechanical system (MEMS) devices. In this work, 0.938(Bi_0.5Na_0.5)TiO₃-0.062BaTiO₃-0.5%Mn (BNBTM) thin film with enhanced ferroelectric property was deposited on SrTiO₃ (STO) single-crystal substrate via pulsed laser deposition. (La_0.6Sr_0.4)CoO₃ (LSCO) was selected as both electrode and buffer layer due to its excellent electrical conductivity and good lattice matching with BNBTM and STO. XRD pattern showed both LSCO and BNBTM to exhibit pure perovskite structure and (100) orientation. Saturated hysteresis loop was obtained with the remnant polarization P_r of 22 μC/cm² and the average coercive field E_c of 9.1 kV/mm. The excellent ferroelectric property makes it a promising candidate for environmentally friendly MEMS devices.